Connections :

Connect the two terminals of DUT to SMU1 and SMU2.

Bias            :

SMU1   :

Voltage Mode, Sweep the voltage(VA) 100 mV to +100 mV,

5mV step, and Measure current(IAP)

SMU2   :

Voltage Mode, Constant, 0V

Define user function IERROR = IAP - VA/1e11

Graph        :

X-axis :

Forcing voltages of SMU1

Y1-axis:

Measured currents(IAP) of SMU1

Y2-axis:

Define IERROR

Results       :

Average current measurement error = 5 fA